Gas Phase Ion Chemistry of Silane with Ethane and Ethyne

Silane–ethane and silane–ethyne systems have been studied by ion trap mass spectrometry and the variation of the abundances, with reaction time, of the ions containing silicon and carbon together in 5:1, 1:1 and 1:5 mixtures, have been reported. The best ion yield, which increases with the total pressure, is observed for 1:1 silane–ethyne mixture. Reaction mechanisms and rate constants of the first nucleation processes have been determined. In SiH4–C2H2 systems, the formation of ions containing new SiC bonds occurs starting mainly from SimHn ions in the first steps, whereas the SimCnHp cluster species further reacts with high efficiency in processes with ethyne.