The realization of a capillary discharge soft X-ray source, for soft x ray laser generation by high temperature (> 100 eV) plasma column excitation in small diameter (4 mm) ceramic capillary, is reported. Radiation at 46.9 nm, produced by a very fast high voltage pulse (∼50 ns, 300 kV) in Neon-like argon, according to a technique initiated by J.J.Rocca et al., has been investigated by multilayer mirrors. Evidence is given for Z-pinch in the plasma column at about 40 kA, with associated X-ray generation. Application of this table-top X-ray source have been considered in different fields as X-ray microscopy and lithography.

Capillary discharge experiment for collisional excitation soft X-ray laser

Limongi T.;
2001-01-01

Abstract

The realization of a capillary discharge soft X-ray source, for soft x ray laser generation by high temperature (> 100 eV) plasma column excitation in small diameter (4 mm) ceramic capillary, is reported. Radiation at 46.9 nm, produced by a very fast high voltage pulse (∼50 ns, 300 kV) in Neon-like argon, according to a technique initiated by J.J.Rocca et al., has been investigated by multilayer mirrors. Evidence is given for Z-pinch in the plasma column at about 40 kA, with associated X-ray generation. Application of this table-top X-ray source have been considered in different fields as X-ray microscopy and lithography.
2001
11
2
2583
2586
Kukhlevsky S.; Kaiser J.; Reale A.; Tomassetti G.; Palladino L.; Ritucci A.; Limongi T.; Flora F.; Mezi L.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/2318/1958037
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