The nuclear microprobe technique IBIC (Ion Beam Induced Charge) was used for tests of different radiation detectors. By using a 2-6 MeV proton microbeam with a current of less than 1000 protons per second, images and profiles of charge collection efficiency in radiation detectors can be produced. This application of the IBIC technique provides results that can be used to study mobility of charge carriers or inhomogeneities of the electric field inside the depletion region. Presented are examples of IBIC tests performed on CVD diamond, CdTe and Si detectors.
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