Sub-micrometer layers of single-crystal diamond suitable for subsequent processing are fabricated. The method employed is a significant enabling technology for nanomechanical and photonic structures incorporating color centers. The process uses a novel double-implant process, annealing, and chemical etching to produce membranes. The thinnest layers achieved to date are 210nm thick.

Fabrication of Ultrathin Single-Crystal Diamond Membranes

OLIVERO, Paolo;
2008-01-01

Abstract

Sub-micrometer layers of single-crystal diamond suitable for subsequent processing are fabricated. The method employed is a significant enabling technology for nanomechanical and photonic structures incorporating color centers. The process uses a novel double-implant process, annealing, and chemical etching to produce membranes. The thinnest layers achieved to date are 210nm thick.
2008
20
4793
4798
http://onlinelibrary.wiley.com/doi/10.1002/adma.200801460/pdf
B. A. Fairchild; P. Olivero; S. Rubanov; A. D. Greentree; F. WaIdermann; R. A. Taylor; I. Walmsley; J. M. Smith; S. Huntington; B. C. Gibson; D. N. Jamieson; S. Prawer
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/2318/86426
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