An accurate control of the optical properties of single crystal diamond during microfabrication processes such as ion implantation plays a crucial role in the engineering of integrated photonic devices. In this work we present a systematic study of the variation of both real and imaginary parts of the refractive index of single crystal diamond, when damaged with 2 and 3 MeV protons at low-medium fluences (range: 10<sup>15</sup> - 10<sup>17</sup> cm<sup>-2</sup>). After implanting in 125 * 125 mum<sup>2</sup> areas with a scanning ion microbeam, the variation of optical pathlength of the implanted regions was measured with laser interferometric microscopy, while their optical transmission was studied using a spectrometric set-up with micrometric spatial resolution. On the basis of a model taking into account the strongly non-uniform damage profile in the bulk sample, the variation of the complex refractive index as a function of damage density was evaluated.

Complex refractive index variation in proton-damaged diamond

OLIVERO, Paolo;
2012-01-01

Abstract

An accurate control of the optical properties of single crystal diamond during microfabrication processes such as ion implantation plays a crucial role in the engineering of integrated photonic devices. In this work we present a systematic study of the variation of both real and imaginary parts of the refractive index of single crystal diamond, when damaged with 2 and 3 MeV protons at low-medium fluences (range: 1015 - 1017 cm-2). After implanting in 125 * 125 mum2 areas with a scanning ion microbeam, the variation of optical pathlength of the implanted regions was measured with laser interferometric microscopy, while their optical transmission was studied using a spectrometric set-up with micrometric spatial resolution. On the basis of a model taking into account the strongly non-uniform damage profile in the bulk sample, the variation of the complex refractive index as a function of damage density was evaluated.
2012
20
19382
19394
S. Lagomarsino;P. Olivero;S. Calusi;D. G. Monticone;L. Giuntini;M. Massi;S. Sciortino;A. Sytchkova;A. Sordini;M. Vannoni
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/2318/121772
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