Soft magnetic thin films of FeCuNbSiB alloy having different thickness were deposited on a Si3N4 substrate by rf sputtering. The target was made of amorphous ribbons having nominal composition Fe73.5Cu1Nb3Si13.5B9. The amorphicity of as-deposited films has been checked by X-ray diffraction technique. Selected samples have been submitted to controlled annealing to induce the amorphous-to-crystalline transformation. The influence of thermal treatments on the hysteresis properties has been studied as a function of thickness and microstructure on as prepared and annealed samples.
Effect of crystallisation on the magnetic properties of FeCuNbBSi amorphous thin films produced by sputtering
BARICCO, Marcello
2011-01-01
Abstract
Soft magnetic thin films of FeCuNbSiB alloy having different thickness were deposited on a Si3N4 substrate by rf sputtering. The target was made of amorphous ribbons having nominal composition Fe73.5Cu1Nb3Si13.5B9. The amorphicity of as-deposited films has been checked by X-ray diffraction technique. Selected samples have been submitted to controlled annealing to induce the amorphous-to-crystalline transformation. The influence of thermal treatments on the hysteresis properties has been studied as a function of thickness and microstructure on as prepared and annealed samples.
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